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Microfabrication

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Silicon Photonic MEMS Integration for Semiconductor Manufacturing
technology2 years ago

Silicon Photonic MEMS Integration for Semiconductor Manufacturing

Researchers led by Associate Professor Niels Quack from the University of Sydney have developed a microfabrication process that combines optics and micro-electro mechanical systems (MEMS) in a microchip, enabling the creation of devices like micro-3D cameras and gas sensors for precision air quality measurement. The technology uses semiconductor manufacturing techniques to create a new, more energy-efficient generation of devices for fiber-optical communications, sensors, and even future quantum computers. The photonic MEMS are compact, consume very little power, are fast, support a broad range of optical carrier signals, and have low optical loss.